INNOVATIVE COATINGS DEVELOPMENT

High deposition Rate, Vacuum-Arc based advanced ceramic coatings

 

PULSE POWER APPLICATIONS

X-Ray Spectroscopy, Plasma Opening Switches and, Plasma Radiation Source Development

 

OPTICAL PLASMA DIAGNOSTICS

Visible, UV & X-Ray Spectroscopy, 2-D Holographic Density Imaging

   

HY-Tech Research Corporation has developed a technology for monitoring the gas composition of effluent gases from process reactors, such as used in the micro-electronics fabrication industry. The HY-Tech effluent gas analyzer is based on optical techniques and it is substantially more economical than the competing process of mass spectroscopy (often referred to as residual gas analysis). The HY-Tech system, referred to as an optical effluent analyzer, can also operate at much higher gas pressures.

Effluent monitoring for the microelectronics industry

APPLICATIONS

© 2001 HY-Tech Research Corporation